Although some of the basic tools are replicated at Begbroke and in the Denys Wilkinson Cleanrooms, in general the Nanofabrication cleanroom is used for processes that require superior resolution. This cleanroom also has access to E-Beam lithography as well as Deep UV contact lithography enabling smaller footprints. Most of the nanofabrication tools at Oxford Nano are found in the Denys Wilkinson Building, placed at the heart of the Keble Triangle.
Explore our range of tools through the links on the left.
